Jywe W.-Y.Liu C.-H.Lin B.-J.Lee M.-T.Lee J.-D.Teng Y.-F.Hsieh T.-H.Wen-Yuh Jywe2022-05-242022-05-242011https://www.scopus.com/inward/record.uri?eid=2-s2.0-79960412151&doi=10.1117%2f12.888361&partnerID=40&md5=0c1c97e33d9c2c7fb148c69f3eda06f0https://scholars.lib.ntu.edu.tw/handle/123456789/611929In this paper, it develops a precision long-stroke 3-DOF nano-stage for the nano photonic crystal process. It integrates a linear motor driven long-stroke stage, a piezoelectric driven three-degrees-of-freedom (3-DOF) nano stage, multi-degrees-of-freedom (MDOF) laser interferometer measurement system and their control systems. The long-stroke nano-stage is a hybrid precision stage that can provide long-stroke and high precision positioning. The common focus horizon regulation system is used to keep the parallelism between writing instrument and the target while the laser direct writing instrument is used to write the nano structure needed. Furthermore, the automatic focusing and horizon control system can compensate the defocusing and angular errors that caused by machining automatically. With this precision 3-DOF nano-stage, the laser direct writing system can improve the process speed, overcome the optical limit of interference to reduce the writing spot, generate arbitrary patterns. ? 2011 SPIE.Angular errorsArbitrary patternsAutomatic focusingDefocusingHigh precision positioningHorizon controlLaser direct writingLaser direct writing systemLaser interferometerMulti degrees of freedomNano-imprintingNano-precision stageNano-stageOptical limitsPrecision stageProcess speedWriting instrumentsControl systemsCrystal cuttingCrystal structureInterferometersLaser interferometryPhotonic crystalsPiezoelectric motorsPrecision engineeringconference paper10.1117/12.8883612-s2.0-79960412151