Kwo, JJKwoMINGHWEI HONGKortan, ARARKortanQueeney, KLKLQueeneyChabal, YJYJChabalLay, TSTSLayMannaerts, JPJPMannaertsBoone, TTBooneKrajewski, JJJJKrajewskiSergent, AMAMSergentothers2018-09-102018-09-102000http://scholars.lib.ntu.edu.tw/handle/123456789/289571New High $ɛ$ Gate Dielectrics Gd_2O3 and Y_2O3 for Siconference paper