Comparison of lateral non-uniformity phenomena between HfO2 and SiO2 from magnified C-V curves in inversion region

Cheng, J.Y.J.Y.ChengHuang, C.T.C.T.HuangLu, H.T.H.T.LuHwu, J.G.J.G.HwuJENN-GWO HWU2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-76549128163&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/347700Comparison of lateral non-uniformity phenomena between HfO2 and SiO2 from magnified C-V curves in inversion regionconference paper10.1149/1.3206631