JUI-CHE TSAILu, L.-C.L.-C.LuHsu, W.-C.W.-C.HsuSun, C.-W.C.-W.SunWu, M.C.M.C.Wu2018-09-102018-09-10200809601317https://www.scopus.com/inward/record.uri?eid=2-s2.0-41849147844&doi=10.1088%2f0960-1317%2f18%2f1%2f015015&partnerID=40&md5=4383278150cee0e1ad250df6ba7a2458A driving scheme using a pair of differential voltages (Vx, Vy) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of 3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from -10 V to + 10 V. © 2008 IOP Publishing Ltd.application/pdfapplication/pdfBias voltage; Linearization; MEMS; Mirrors; Comb-drive actuators; Gimbal-less structure; MEMS scanner; Micromirrors; Actuatorsjournal article10.1088/0960-1317/18/1/0150152-s2.0-41849147844