High-Frequency Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Horns

Tsai, Shirley C.Shirley C.TsaiSong, Yu L.Yu L.SongTseng, Terry K.Terry K.TsengChou, Yuan F.Yuan F.ChouChen, W.J.W.J.ChenTsai, Chen S.Chen S.Tsai2011-02-112018-06-282011-02-112018-06-282004-03http://ntur.lib.ntu.edu.tw//handle/246246/222299en-USHigh-Frequency Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Hornsjournal article