Vertical-cavity surface-emitting laser diodes fabricated by in situ dry etching and molecular beam epitaxial regrowth

Choquette, Kent DKent DChoquetteMINGHWEI HONGFreund, RSRSFreundMannaerts, JPJPMannaertsWetzel, RCRCWetzelLeibenguth, RERELeibenguth2018-09-102018-09-101993http://scholars.lib.ntu.edu.tw/handle/123456789/302769Vertical-cavity surface-emitting laser diodes fabricated by in situ dry etching and molecular beam epitaxial regrowthjournal article