Collapse of microchannels during anodic bonding: theory and experiments

Shih, W.P.W.P.ShihHui, C.Y.C.Y.HuiTien, N.C.N.C.Tien2008-11-052018-06-282008-11-052018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/85975application/pdf431618 bytesapplication/pdfen-USCollapse of microchannels during anodic bonding: theory and experimentsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/85975/1/05.pdf