On the interaction between measurement strategy and control performance in semiconductor manufacturing

Su, An-JhihAn-JhihSuYu, Cheng-ChingCheng-ChingYuOgunnaike, Babatunde A.Babatunde A.Ogunnaike2008-12-242018-06-282008-12-242018-06-282008http://ntur.lib.ntu.edu.tw//handle/246246/93223application/pdf271223 bytesapplication/pdfen-USOn the interaction between measurement strategy and control performance in semiconductor manufacturingjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/93223/1/66.pdf