Fabrication and characterization of nano-structuring polymeric surfaces for MEMS applications

YEN-WEN LU2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-70349152201&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/346996Fabrication and characterization of nano-structuring polymeric surfaces for MEMS applicationsconference paper10.1115/IMECE2008-68893