Molecular beam epitaxy grown template for subsequent atomic layer deposition of high 庥 dielectrics

Lee, K.Y.K.Y.LeeLee, W.C.W.C.LeeLee, Y.J.Y.J.LeeHuang, M.L.M.L.HuangChang, C.H.C.H.ChangWu, T.B.T.B.WuMINGHWEI HONGKwo, J.J.Kwo2019-12-272019-12-272006https://scholars.lib.ntu.edu.tw/handle/123456789/443449Molecular beam epitaxy grown template for subsequent atomic layer deposition of high 庥 dielectricsjournal article10.1063/1.23975422-s2.0-33751565290https://www.scopus.com/inward/record.uri?eid=2-s2.0-33751565290&doi=10.1063%2f1.2397542&partnerID=40&md5=8653c42fde33151f4324bd4216007b87