臺灣大學: 電子工程學研究所李嗣涔馬梃曜Ma, Ting-YaoTing-YaoMa2013-04-102018-07-102013-04-102018-07-102011http://ntur.lib.ntu.edu.tw//handle/246246/256800在本論文中，首先探討非晶碳化矽薄膜在200℃底下成長時的結構、光學及電學特性，並與250℃時成長的薄膜相比較，以確定低溫成長的非晶碳化矽薄膜特性。接著利用此材料寬能隙的優點引入太陽能電池製程中作為太陽能電池的透光層以獲得更高的開路電壓。為了發展使用在電子紙上的太陽能電池，配合其可捲曲式的特性，我們先在塑膠基板上成功製作了三層堆疊非晶碳化矽p-i-n太陽能電池。而為了增進太陽能電池在塑膠基板上的效能，我們採用表面紋理化的方法，先在Asahi-U基板上製作太陽能電池來與平面基板上的太陽能電池作比較，接著使用一種新的技術去在PI基板上製造紋理表面，並成功的在具紋理表面的PI基板上製作了三層堆疊非晶碳化矽p-i-n太陽能電池，比起平面基板上的太陽能電池，其效能提升了16.4%.In this thesis, the structure, optical and electrical properties of the hydrogenated amorphous silicon carbide (a-SiC:H) thin films fabricated under 200℃ were investigated first, then these properties are compared to a-SiC:H thin films fabricated under 250℃ in order to understand the properties of a-SiC:H thin films fabricated under low temperature. Then, they are used to fabricate the amorphous silicon solar cells as the window material to obtain higher open-circuit voltage due to its wider optical gap. In order to develop the solar cell which can supply power of electric paper which is foldable, a triple-junction a-SiC:H p-i-n solar cell has been fabricated successfully on plastic substrate first. Then in order to enhance the performance of the solar cell on plastic substrate, surface texturing is used. A solar cell on Asahi-U substrate was fabricated to compare with a solar cell on flat substrate. In the next stage, a new method to fabricate textured surface on plastic substrate was used and a triple-junction a-SiC:H p-i-n solar cell was fabricated successfully on the textured plastic substrate. Its efficiency was increased 16.4% as compared to those on flat substrate.934762 bytesapplication/pdfen-US電子紙非晶碳化矽高開路電壓薄膜太陽能疊電池E-paperHigh Open-circuit VoltageTandema-SiC:HSolar Cellthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/256800/1/ntu-100-R97943085-1.pdf