Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring design

Hsieh, T.-L.T.-L.HsiehChang, Y.-T.Y.-T.ChangChiou, S.-J.S.-J.ChiouTsai, J.-C.J.-C.TsaiHah, D.D.HahWu, M.C.M.C.WuJUI-CHE TSAI2018-09-102018-09-102008http://www.scopus.com/inward/record.url?eid=2-s2.0-54049127835&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/340819Performance improvement of a two-axis radial-vertical-combdrive scanner by using a symmetric spring designconference paper10.1109/OMEMS.2008.4607852