范光照Fei, Y.T.Y.T.FeiYu, X.F.X.F.YuFan, K.C.K.C.Fan2009-05-152018-06-282009-05-152018-06-282005-3http://ntur.lib.ntu.edu.tw//handle/246246/156512en-USDevelopment of a Micro-CMMconference paper