Laser direct imprint of silicon nanostructure with low damage on Si for optical devices

Liang, E.-Z.E.-Z.LiangHuang, Z.-R.Z.-R.HuangCHING-FUH LIN2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-33847155583&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316336[SDGs]SDG7Laser direct imprint of silicon nanostructure with low damage on Si for optical devicesconference paper10.1109/CLEOPR.2005.1569839