Line stitching in servo-assisted electron beam lithography system

Yen, J.-Y.J.-Y.YenChen, L.-S.L.-S.ChenChiu, P.P.ChiuJIA-YUSH YEN2018-09-102018-09-102011http://www.scopus.com/inward/record.url?eid=2-s2.0-80053979240&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/362678[SDGs]SDG14Line stitching in servo-assisted electron beam lithography systemconference paper10.1109/AIM.2011.60270262-s2.0-80053979240