Large grain poly-Si (?10 μm) TFTs prepared by excimer laser annealing through a thick SiON absorption layer

Liu, S.-D.S.-D.LiuSI-CHEN LEE2020-06-112020-06-112004https://scholars.lib.ntu.edu.tw/handle/123456789/498856Large grain poly-Si (?10 μm) TFTs prepared by excimer laser annealing through a thick SiON absorption layerjournal article10.1109/TED.2003.8217042-s2.0-0442326806https://www.scopus.com/inward/record.uri?eid=2-s2.0-0442326806&doi=10.1109%2fTED.2003.821704&partnerID=40&md5=df0ab1a8983da4c718ce53d6cab7dddd