2009-08-012024-05-17https://scholars.lib.ntu.edu.tw/handle/123456789/680707摘要：由於固態照明及液晶顯示背光源之應用需求，以氮化銦鎵製作白光及偏振化發光二極體之研究受到高度重視，而在白光二極體之製作上，目前大量使用的螢光粉技術已暴露不少缺點，因此，全半導體白光二極體之發展格外受到注意。本計畫中，我們提出兩個研究努力方向來達成全氮化銦鎵白光及偏振化發光二極體，包括以新穎有機金屬氣相沉積技術來成長高效率綠至紅光氮化銦鎵∕氮化鎵量子井以及利用表面電漿子耦合量子井方法來提升綠至紅光二極體發光效率並控制發光二極體之輸出偏振。在有機金屬氣相沉積生長方面，我們將改善預施應力成長法及流量調制法來增加量子井內之銦成份。同時，為達成偏振發光效果，也為增加銦含量，除了傳統的c-平面晶體，我們也將成長a-及m-平面之氮化物晶體結構。有關a-及m-平面之晶體結構，我們的重點是生長綠至紅光發光結構，此研究重點與國內外其他研究群之方向並不相同。在表面電漿子之耦合方面，我們將發展便宜實用之技術來製作金屬奈米結構以達到表面電漿子與量子井之有效耦合。同時，我們也將製作一維之金屬週期結構來達成偏振化之表面電漿子耦合而造成偏振光之放大效果。藉此偏振化之表面電漿子耦合，我們也可製作偏振化之發光二極體。<br> Abstract: For the applications of solid-state lighting and liquid-crystal display backlighting, the development of InGaN-based white-light and polarized light-emitting diodes (LEDs) has become an important issue of research. Because of several disadvantages of using phosphors for converting photon colors in implementing white-light devices, study on all-semiconductor white-light LEDs has attracted much attention. For this purpose, we propose to implement all-InGaN white-light and polarized LEDs with two efforts, including novel MOCVD growth techniques for high-efficiency green-red-emitting InGaN/GaN quantum wells (QWs) and the use of surface plasmon coupling for the light emission enhancement in the green-red range and for the control of the LED output polarization. In MOCVD growth, to increase the indium incorporation, the techniques of prestrain growth and flow-rate modulation are to be used. Also, to achieve polarized emission and to increase the indium incorporation, the a- and m-plane nitride growths are considered, besides conventional c-plane growth. In the a- and m-plane growths, our research focuses on the implementations of green-red LEDs, which are different from what have been developed in US and Taiwan. In the issue of surface plasmon coupling, we will develop inexpensive methods for fabricating metal nanostructures to effectively realize the surface plasmon coupling with InGaN/GaN QWs. Besides, we will implement 1-D metallic gratings for polarized surface plasmon coupling to enhance polarized light emission. With such polarized coupling, polarized LEDs can be fabricated. The combination of polarized surface plasmon coupling and polarized emissions in a- and m-plane epitaxial structures can lead to more effective manipulation of LED output polarization.固態照明液晶顯示背光源白光發光二極體偏振化發光二極體有機金屬氣相沉積法表面電漿子solid-state lightingliquid-crystal display back-lightingwhite-light light-emitting diodepolarized light-emitting diodemetalorganic chemical vapor depositionsurface plasmon