Structural control and properties of low-dielectric-constant poly(hydrogen silsesquioxane) precursors and their thin films

Liu, Wei-ChihWei-ChihLiuYu, Yang-YenYang-YenYuWEN-CHANG CHEN2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-0942268469&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/307732Structural control and properties of low-dielectric-constant poly(hydrogen silsesquioxane) precursors and their thin filmsjournal article10.1002/app.134462-s2.0-0942268469WOS:000187913000072