A 4-bit MEMS phase shifter at 24 GHz based on lateral MEMS switches

S.-W. LaiJ.-F. KiangJEAN-FU KIANG2018-09-102018-09-102010-08http://scholars.lib.ntu.edu.tw/handle/123456789/359520[SDGs]SDG7A 4-bit MEMS phase shifter at 24 GHz based on lateral MEMS switchesconference paper10.1109/AEM2C.2010.55787652-s2.0-77958492360