Fabry-Perot type antireflective coatings for binary mask applications in ArF and F<inf>2</inf>excimer laser lithographies

Chen, H.L.H.L.ChenLee, C.C.C.C.LeeChuang, Y.F.Y.F.ChuangLiu, M.C.M.C.LiuHsieh, C.I.C.I.HsiehKo, F.H.F.H.KoHSUEN-LI CHEN2020-05-122020-05-122003https://scholars.lib.ntu.edu.tw/handle/123456789/491366Fabry-Perot type antireflective coatings for binary mask applications in ArF and F<inf>2</inf>excimer laser lithographiesjournal article10.1149/1.15600012-s2.0-0037379672https://www.scopus.com/inward/record.uri?eid=2-s2.0-0037379672&doi=10.1149%2f1.1560001&partnerID=40&md5=dec3f418863a36005bc986aa7f3fa245