Reactive-Ion Etching of Bismuth Thin Film Using CHF3

Yen-Cheng KoDing-Lun WuChe-Wei YangHao-Hsiung LinHAO-HSIUNG LIN2019-10-312019-10-312018https://scholars.lib.ntu.edu.tw/handle/123456789/428869Reactive-Ion Etching of Bismuth Thin Film Using CHF3conference paper