Feng, Z. C.Z. C.FengLien, S. C.S. C.LienZhao, J. H.J. H.ZhaoLu, X. W. Sun and W.X. W. Sun and W.Lu2010-09-272018-07-052010-09-272018-07-052008http://ntur.lib.ntu.edu.tw//handle/246246/205555en-USStructural and Optical Studies on Ion-implanted 6H-SiC Thin Filmsjournal article