Composition redistribution of self-assembled Ge islands on Si (001) during annealing

CHEE-WEE LIULee, S.W.S.W.LeeChang, H.T.H.T.ChangLee, C.H.C.H.LeeCheng, S.L.S.L.ChengCHEE-WEE LIU2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-73649099491&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/358257[SDGs]SDG14Composition redistribution of self-assembled Ge islands on Si (001) during annealingjournal article10.1016/j.tsf.2009.10.087