Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithography

Chen, H.L.H.L.ChenHuang, K.T.K.T.HuangLin, C.H.C.H.LinWang, W.Y.W.Y.WangFan, W.W.FanHSUEN-LI CHEN2020-05-122020-05-122007https://scholars.lib.ntu.edu.tw/handle/123456789/491347Fabrication of sub-wavelength antireflective structures in solar cells by utilizing modified illumination and defocus techniques in optical lithographyjournal article10.1016/j.mee.2007.01.0262-s2.0-34247645561https://www.scopus.com/inward/record.uri?eid=2-s2.0-34247645561&doi=10.1016%2fj.mee.2007.01.026&partnerID=40&md5=8e5d7efd21e625fe041cf4090b284f5e