A novel approach of using a MBE template for ALD growth of high-庥 dielectrics

Lee, K.Y.K.Y.LeeLee, W.C.W.C.LeeHuang, M.L.M.L.HuangChang, C.H.C.H.ChangLee, Y.J.Y.J.LeeChiu, Y.K.Y.K.ChiuWu, T.B.T.B.WuMINGHWEI HONGKwo, R.R.Kwo2019-12-272019-12-272007https://scholars.lib.ntu.edu.tw/handle/123456789/443443A novel approach of using a MBE template for ALD growth of high-庥 dielectricsjournal article10.1016/j.jcrysgro.2006.11.2622-s2.0-33947327827https://www.scopus.com/inward/record.uri?eid=2-s2.0-33947327827&doi=10.1016%2fj.jcrysgro.2006.11.262&partnerID=40&md5=2f598ca5e19bc54970e34b0b3e3f3bfe