Hysteresis reduction by fluorine incorporation into high permittivity tetragonal ZrO<inf>2</inf> on Ge

CHEE-WEE LIUChang, H.-C.H.-C.ChangLin, C.-M.C.-M.LinHuang, C.-H.C.-H.HuangCHEE-WEE LIU2018-09-102018-09-102014http://www.scopus.com/inward/record.url?eid=2-s2.0-84893368329&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/387384[SDGs]SDG6Hysteresis reduction by fluorine incorporation into high permittivity tetragonal ZrO<inf>2</inf> on Gejournal article10.1063/1.4862481