Estimation of dressing effects in chemical mechanical polishing with sorts of diamond dressers

Chen, K.-R.K.-R.ChenYoung, H.-T.H.-T.YoungChen, K.R.K.R.ChenHONG-TSU YOUNG2020-01-132020-01-132009https://scholars.lib.ntu.edu.tw/handle/123456789/447497Estimation of dressing effects in chemical mechanical polishing with sorts of diamond dressersconference paper10.4028/www.scientific.net/AMR.76-78.1752-s2.0-73949106200https://www.scopus.com/inward/record.uri?eid=2-s2.0-73949106200&doi=10.4028%2fwww.scientific.net%2fAMR.76-78.175&partnerID=40&md5=81902a1d5748b6a842b74e49f7ff4f2e