Ultra-low-loss and broadband micromachined inductors and transformers for 30-100 GHz CMOS RFIC applications by CMOS-compatible ICP deep trench technology

SHEY-SHI LU2018-09-102018-09-102007http://www.scopus.com/inward/record.url?eid=2-s2.0-34548140184&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/332323[SDGs]SDG7Ultra-low-loss and broadband micromachined inductors and transformers for 30-100 GHz CMOS RFIC applications by CMOS-compatible ICP deep trench technologyconference paper10.1109/RWS.2007.351808