Virtual metrology modeling based on Gaussian Bayesian network

Yang, W.-T.W.-T.YangBlue, J.J.BlueRoussy, A.A.RoussyReis, M.S.M.S.ReisPinaton, J.J.PinatonJAKEY BLUE2020-03-022020-03-022019https://scholars.lib.ntu.edu.tw/handle/123456789/467294Virtual metrology modeling based on Gaussian Bayesian networkconference paper10.1109/WSC.2018.86324852-s2.0-85062610801https://www.scopus.com/inward/record.uri?eid=2-s2.0-85062610801&doi=10.1109%2fWSC.2018.8632485&partnerID=40&md5=61fb29dc30a97d352a56cbbdc2edddbc