Effects of N<inf>2</inf>O fluence on the PECVD-grown Si-rich SiO <inf>x</inf> with buried Si nanocrystals

Lin, C.-J.C.-J.LinKuo, H.-C.H.-C.KuoChen, C.-Y.C.-Y.ChenChueh, Y.-L.Y.-L.ChuehChou, L.-J.L.-J.ChouChang, C.-W.C.-W.ChangDiau, E.W.-G.E.W.-G.DiauGONG-RU LIN2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-30544442148&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316376Effects of N<inf>2</inf>O fluence on the PECVD-grown Si-rich SiO <inf>x</inf> with buried Si nanocrystalsconference paper