Compact Heat Transfer Model Generation for MEMS Devices with Arbitrary 3D Geometries

C.-C. YuY.-J. YangYAO-JOE YANG2021-11-252021-11-252002https://scholars.lib.ntu.edu.tw/handle/123456789/587846Chai-Yi, TaiwanCompact Heat Transfer Model Generation for MEMS Devices with Arbitrary 3D Geometriesconference paper