High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragms

Lai, Y.-J.Y.-J.LaiLi, W.-C.W.-C.LiLin, C.-M.C.-M.LinFelmetsger, V.V.V.V.FelmetsgerPisano, A.P.A.P.PisanoWEI-CHANG LI2020-04-282020-04-282013https://scholars.lib.ntu.edu.tw/handle/123456789/486402[SDGs]SDG7High-temperature stable piezoelectric aluminum nitride energy harvesters utilizing elastically supported diaphragmsconference paper10.1109/Transducers.2013.66272572-s2.0-84891691489https://www.scopus.com/inward/record.uri?eid=2-s2.0-84891691489&doi=10.1109%2fTransducers.2013.6627257&partnerID=40&md5=0335490fe89b9a0d90107495121c6a24