Electronic and Bonding Structures of Amorphous Si-C-N Thin Films by X-ray-absorption Spectroscopy

H. M. TsaiL. C. Chen2020-06-202020-06-20200100036951https://scholars.lib.ntu.edu.tw/handle/123456789/503907Electronic and Bonding Structures of Amorphous Si-C-N Thin Films by X-ray-absorption Spectroscopyjournal articlehttps://doi.org/10.1063/1.1409275