2002-05-012024-05-18https://scholars.lib.ntu.edu.tw/handle/123456789/703468摘要：影像感測器是未來醫療、電腦、通訊、家電、娛樂之主要設備，CMOS感測器在體積、耗電、製程、價格都遠勝過CCD，惟其畫面素質亟待提升。傳統CMOS影像感測器以濾光片將光分別濾去RGB再行光電信號處理，依此原理光損失甚大，且素質的提升困難。本研究計劃擬以分光原理，將光在繞射分出RGB，全光作光電處理，是在原理上一大突破，技術上牽涉光學、微機電及微射出或熱壓，特由台大應力所、機械所及業界帝晶光電公司合作進行兩年研究。本計畫係結合微機電製程技術和精密塑膠成型，提出一種CMOS影像感測器之創新型增光分色片設計構想。於此設計構想中，將製作整合微透鏡(Micro-lens)與閃耀式光柵(Blazed Grating)等微光學元件，用以取代目前影像感測時所使用之傳統彩色濾光片。此創新型增光分色片，主要為一以聚合物為基材之薄膠片(Film)，包括了微透鏡與閃耀式光柵等兩種微光學元件。其中，微透鏡之使用將主要用以定義畫素(Pixel)位置並輔以少許增光的功能；而閃耀式光柵的使用，可使不同波長之入射光將其大部分之能量集中在其一階繞射方向，而達到濾光片分色的效果。子計畫一是「微光學元件之設計與製作」，藉由光學<br> Abstract: With the technology-upgrading migration toward high-value-added opto-electronics industry, the imaging technology has become one of the developing sectors of information technology in Taiwan. The new demand of explosive use of internet, digital camera, imaged mobile communication, and biomedical applications has also driven the imaging technology to be rapidly prevalent into market. Cost, size, and performance are therefore to become major requirements as well as entry barriers of the imaging industry. CMOS and CCD image sensors are the mainstream products in current vision market. Meanwhile, the CMOS image sensors that employ semiconductor techniques have many advantages over CCD devices such as size, volume, power consumption, price and high integration of sensors and electronics. Therefore, the CMOS image sensor are rapidly growing and sharing the market with CCD image sensors that have long been used in many applications.However, the optical efficiency in opto-electronic converted process is still less competitive in the CMOS image sensor to the CCD device due to their naturally distinctive mechanisms. For incoming light intensity of high-end color image sensors, the conventional color filter is used to filter out undesired wavelength bandwidths and only allow a single color for transmission, thus greatly diminishing optical intensity. Moreover, the process complexity, yield and cost of color filters seriously lead to restricted application in market. In this project, an innovative, highly transparent polymer-based color divider is used for red-green-blue light separation instead of light filtering used in color filters. In other words, the use of incoming light to sensing elements is highly efficient. To implement this light-enhanced and cost-effective color divider, microfabrication and high-throughput replication techniques are chosen to realize the film and to be mass-produced for cost competence. The proposed project contains two sub-projects, namely, (1) Design and microfabrication of micro optics, and (2) hot embossing and micro injection molding techniques. The two-sub-projects teamed with highly R&D-recognized S-light Corp. are organized to support each other and are requesting the funding of NTD 10,548,000 from the NSC academia-industrial collaborative program.In sub-project 1, an innovative light-enhanced color divider is to be designed, fabricated, and characterized, which attempts to replace currently used color filters of optoelectronic image sensors. The polymer-based transparent color divider is to be made with micro optic components, such as micro lenses and blazed gratings, on film surfaces of both sides. It is fundamentally impressive that the light efficiency in the novel film employing diffraction for light separation is nearly three times greater than the one in conventional color filters. The color filter that, in principle, filters out undesired wavelengths remains around one third of incoming light intensity. With the創新型增光分色片CMOS影像感測器微透鏡閃耀式光柵熱壓成型微射出Color DividerCMOS Image SensorMicro OpticsMEMsHot EmbossingMicro Injection