Hsiao, L.-J.L.-J.HsiaoHOANG-YAN LIN2020-06-112020-06-112018https://scholars.lib.ntu.edu.tw/handle/123456789/499195Reflective EUVL tool design with generalized Gaussian constant mathematicsjournal article10.1364/AO.57.0058842-s2.0-85050467140https://www.scopus.com/inward/record.uri?eid=2-s2.0-85050467140&doi=10.1364%2fAO.57.005884&partnerID=40&md5=a0dbe0f3eff75db3c889e31d8485a5b2