張陸滿臺灣大學:土木工程學研究所許家榮Hsu, Chia-JungChia-JungHsu2010-06-302018-07-092010-06-302018-07-092008U0001-1607200815422800http://ntur.lib.ntu.edu.tw//handle/246246/187697台灣地區水資源供需受環境條件與暖化影響較不穩定，高科技廠房於製程用水量與超純水水質要求標準在未來隨製程技術與產品規格發展有增加趨勢。為促使廠商有效利用水資源，避免影響廠房生產運作，科管局針對園區廠商制定嚴格用水回收率標準，但目前並非所有廠商皆有達到相關用水回收率規定要求，新建廠面對較高標準要求在執行達成上確有困難，其中必有影響廠商提昇製程用水回收率因素。研究透過文獻回顧、個案實證分析與專家訪談等方法對於研究主題進行討論，主要將藉由檢視個案工廠用水情形與歷年各月份製程用水回收率執行成效，並與個案用水管理者當面訪談，對於研究主題進行分析探討。研究目的欲探討廠商提昇製程用水回收率執行成效之影響因素，並提出高科技廠房水資源利用管理之執行策略；以工程專案生命週期的概念提出廠商於執行提昇製程用水回收率專案生命週期各階段之相關影響因素應考量評估項目，提供用水管理者於檢討考核之依據。The supply and demand of water resource in Taiwan is in an unstable status due to the effect of the environmental impact and global warming. Water conservation of manufacturing and ultra-pure water quality of High-Tech facilities is foreseeable to have an increasing trend as the manufacturing technology grows. In order to encourage the High-Tech manufacturers to use water resource effectively and to avoid big impact on the manufacturing operation, Science Park Administration has set high standard of water reuse ratio for manufacturers in Science Park. However, not all of manufacturers can achieve the stipulated standards. Besides, to some new comers these high standards are difficult to comply with. Moreover, the main factors affecting the manufacturers to improve their water reuse ratio are unclear.herefore, the purpose of study is, firstly, to find out the main factors affecting the performance of manufacturing water reuse ratio and to develop strategy for managing the water resource used in High-Tech facilities. Secondly, this study illustrates related affecting factors and the items that should be evaluated in a construction life cycle pattern; hence, to provide a basis for the water usage managers. The study examines the main factors through literature review, case study and interview. The status of water usage and the monthly performance of manufacturing water reuse ratio of the studied case in recent years are examined. Then, interviews with related professionals to investigate the possible factors affecting the performance of manufacturing water reuse ratio are also performed.審定書..................................I謝...................................II文摘要..............................III文摘要...............................IV錄....................................V目錄...............................VIII目錄.................................IX一章 緒論............................1.1 研究背景........................1.2 研究動機........................1.3 研究問題........................3.4 研究目的........................3.5 研究範圍與限制..................4.6 研究方法........................4.7 研究流程........................5.8 章節架構........................6二章 文獻回顧........................7.1 台灣水資源環境現況..............7.1.1 台灣水資源環境特性與供需情形....7.1.2 台灣水資源環境衝擊問題..........9.2 工業發展態勢...................10.3 工業用水相關說明...............12.3.1 工業用水需求...................12.3.2 工業用水相關政策計劃...........15.3.3 工業用水分類...................18.3.4 水平衡原理.....................19.4 水資源利用效率評估指標.........22.4.1 水量利用指標...................23.4.2 重複利用指標...................25.5 高科技產業定義與發展態勢.......31.5.1 高科技產業與廠房相關定義分類...31.5.2 半導體產業發展態勢.............33.6 小結...........................34三章 半導體廠用水單元...............35.1 半導體廠用水特性...............35.2 純水製造系統用水單元...........36.3 製程設備用水單元...............40.4 小結...........................42四章 個案實證研析...................43.1 個案公司簡介...................43.2 個案工廠用水現況...............43.2.1 工廠用水需求概況...............43.2.2 工廠用水需求分類...............44.2.3 個案工廠用水平衡分析圖.........45.2.4 廠區內外供水設備規劃...........45.2.5 個案工廠用水管理組織...........46.3 個案工廠用水回收執行方式.......47.3.1 純水製造系統用水回收...........47.3.2 製程設備機台廢排水回收.........48.3.2.1 製程機台排水分流標準...........48.3.2.2 機台排水分流規劃...............50.3.3 民生用水回收...................53.4 個案工廠製程用水回收率研析.....54.4.1 營運維護時期：91-92年..........55.4.2 營運維護時期：93-94年..........56.4.3 營運維護時期：95-96年..........58.5 專家訪談說明...................59.6 小結...........................60五章 提昇製程用水回收率影響因素研析.61.1 用水回收規劃評估...............61.1.1 回收處理設備空間規劃...........61.1.2 製程機台排水分流規劃...........62.2 用水減量與回收處理技術.........64.2.1 廢排水回收處理技術.............64.2.2 製程用水減量技術...............66.3 用水減量與回收處理成本效益.....67.3.1 用水減量效益...................67.3.2 回收處理運轉成本效益...........68.4 其他可能影響因素...............71.4.1 產品良率風險考量...............71.4.2 回收率目標達成獎勵機制.........74.4.3 污水下水道處理計價方式.........74.4.4 不同技術世代廠差異.............75.5 影響因素彙整討論...............77六章 結論與建議.....................81.1 研究結果論述...................81.2 後續研究建議...................831382862 bytesapplication/pdfen-US高科技廠房水資源管理用水回收率High-Tech FacilityWater Resource ManagementWater Reuse Ratiothesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/187697/1/ntu-97-R95521709-1.pdf