Optical properties and photoconductivity of amorphous silicon carbon nitride thin film and its application for UV detection

C. W. ChenC. C. HuangY. Y. LinL. C. ChenK. H. ChenW. F. Su2020-06-202020-06-20200509259635https://scholars.lib.ntu.edu.tw/handle/123456789/503970Optical properties and photoconductivity of amorphous silicon carbon nitride thin film and its application for UV detectionjournal articlehttps://doi.org/10.1016/j.diamond.2004.11.027