Jywe W.Liu C.-H.Teng Y.-F.Wen-Yuh Jywe2022-05-242022-05-242007https://www.scopus.com/inward/record.uri?eid=2-s2.0-34250833471&doi=10.1243%2f09544054JEM487&partnerID=40&md5=1ede83b0f9e35e366793e50ffaf27190https://scholars.lib.ntu.edu.tw/handle/123456789/611970The current paper concentrates on the design and manufacturing process of a stack-type nanometre positioning stage with high accuracy and multiple degrees of freedom for a heavy-loading machine. The stack-type stage described in this paper comprises a flexible structure as the primary component and can be easily adjusted from single-axis movement to a five-degrees-of-freedom motion to cope with different needs. Piezoelectric actuators are known for their unique features, such as quick response, high resolution, electrical mechanical coupling efficiency, and low heat generation. Therefore, six piezoelectric actuators are provided to trigger the five-degrees-of-freedom motion for the positioning stage. The stage sensor is provided with five capacitive sensors inside the five-degrees-of-freedom stage to measure the stage displacement. As indicated by the experimental results, the linear displacement reaches 52.76μm along the x axis, 51.79μm along the y axis, and 12.08 |xm along the z axis. The rotation displacement around the x axis is θx = 184 μrad and the rotation displacement around the y axis is θy = 217 μrad. The heavy-loading test indicates that the stage is capable of taking a load of 12 kgs. ? IMechE 2007.CapacitanceDegrees of freedom (mechanics)Laser interferometryLoadingPiezoelectric actuatorsSensorsHeavy-loading machineLaser interferometersQuick responseMachiningjournal article10.1243/09544054JEM4872-s2.0-34250833471