Stress and curvature of periodic trench structures on Sapphire substrate with GaN film

Hsieh, C.F.C.F.HsiehChen, C.W.C.W.ChenChen, C.H.C.H.ChenLiao, M.H.M.H.Liao2019-03-112019-03-112014https://scholars.lib.ntu.edu.tw/handle/123456789/404503Stress and curvature of periodic trench structures on Sapphire substrate with GaN filmconference proceedings10.1016/j.proeng.2014.06.3502-s2.0-84949122734