Comparison of high-resistivity ZnO films sputtered on different substrates

Lin, G.-R.G.-R.LinWang, S.-C.S.-C.WangGONG-RU LIN2018-09-102018-09-102002http://www.scopus.com/inward/record.url?eid=2-s2.0-0036544439&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/298256Comparison of high-resistivity ZnO films sputtered on different substratesjournal article