A MEMS micromirror fabricated using CMOS postprocess

Cheng, Y.-C.Y.-C.ChengDai, C.-L.C.-L.DaiLee, C.-Y.C.-Y.LeeChen, Ping-HeiPing-HeiChenChang, P.-Z.P.-Z.Chang2011-02-112018-06-282011-02-112018-06-282005-05http://ntur.lib.ntu.edu.tw//handle/246246/222397en-USA MEMS micromirror fabricated using CMOS postprocessjournal article