Impacts of sensor layouts on the performance of a long-stroke nano-positioning stage

Wang F.-C.Wang K.-A.Chen Y.-Y.Chen H.-J.JIA-YUSH YEN2019-07-032019-07-03201616878132https://www.scopus.com/inward/record.uri?eid=2-s2.0-85001907627&doi=10.1177%2f1687814016680192&partnerID=40&md5=022039b9e921db9e482dcb65b8c6ddb8https://scholars.lib.ntu.edu.tw/handle/123456789/412565[SDGs]SDG3[SDGs]SDG7Impacts of sensor layouts on the performance of a long-stroke nano-positioning stagejournal article10.1177/16878140166801922-s2.0-85001907627