Design of a PZT Actuated Cantilever Waveguide Scanner Using an Aerosol Deposition Process

Schipf, D.R.D.R.SchipfTsui, C.-L.C.-L.TsuiKuo, C.-L.C.-L.KuoWang, Y.-J.Y.-J.WangWu, W.-J.W.-J.WuWang, W.-C.W.-C.WangWEN-JONG WU2020-01-172020-01-172014https://scholars.lib.ntu.edu.tw/handle/123456789/451980Design of a PZT Actuated Cantilever Waveguide Scanner Using an Aerosol Deposition Processconference paper10.1109/ISOT.2014.422-s2.0-84988293839https://www.scopus.com/inward/record.uri?eid=2-s2.0-84988293839&doi=10.1109%2fISOT.2014.42&partnerID=40&md5=3cbbed184d27f94b67e66ad4b86c145d