Portable measurement system for static and dynamic characterization of MEMS component

Wu, H.-W.H.-W.WuChen, L.-C.L.-C.ChenTapilouw, A.M.A.M.TapilouwNguyen, X.-L.X.-L.NguyenChen, J.-L.J.-L.ChenLIANG-CHIA CHEN2020-01-132020-01-132013https://scholars.lib.ntu.edu.tw/handle/123456789/447846Portable measurement system for static and dynamic characterization of MEMS componentconference paper10.1007/978-1-4614-6747-2_1082-s2.0-84881054415https://www.scopus.com/inward/record.uri?eid=2-s2.0-84881054415&doi=10.1007%2f978-1-4614-6747-2_108&partnerID=40&md5=04e268107861d91cc5f03b647e83b234