Novel guiding template and mask assignment for DSA-MP hybrid lithography using multiple BCP materials

Yi-Ting LinIris Hui-Ru JiangHUI-RU JIANG江蕙如2019-10-242019-10-242019https://scholars.lib.ntu.edu.tw/handle/123456789/427639Novel guiding template and mask assignment for DSA-MP hybrid lithography using multiple BCP materialsconference paper10.1145/3316781.3317871