Structural and Optical Studies on Ion-implanted 6H

Feng, Z.C.Z.C.FengLien, S.C.S.C.LienZhao, J.H.J.H.ZhaoSun, X.W.X.W.SunLu, W.W.Lu2009-03-112018-07-062009-03-112018-07-062008http://ntur.lib.ntu.edu.tw//handle/246246/144223application/pdf745799 bytesapplication/pdfen-USStructural and Optical Studies on Ion-implanted 6H–SiC Thin Filmsjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/144223/1/31.pdf