S. ChattopadhyayL. C. ChenC. T. WuK. H. ChenJ. S. WuY. F. ChenG. LehmannP. Hess2020-06-202020-06-20200100036951https://scholars.lib.ntu.edu.tw/handle/123456789/503901Thermal Diffusivity in Amorphous Silicon Carbon Nitride Thin Films by the Traveling Wave Techniquejournal article10.1063/1.1386619