Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanism

Chen, M.-Y.M.-Y.ChenHuang, H.-H.H.-H.HuangHung, S.-K.S.-K.HungFu, L.-C.L.-C.FuLI-CHEN FU2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-34047209322&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/324011Design and implementation of a new 3-DOF electromagnetic micropositioner utilizing flexure mechanismconference paper