Single-Crystal Y <inf>2</inf> O <inf>3</inf> Epitaxially on GaAs(001) and (111) Using Atomic Layer Deposition

Lin, Y.H.Y.H.LinCheng, C.K.C.K.ChengChen, K.H.K.H.ChenFu, C.H.C.H.FuChang, T.W.T.W.ChangHsu, C.H.C.H.HsuKwo, J.J.KwoMINGHWEI HONGCHIA-KUEN CHENG2019-12-272019-12-272015https://scholars.lib.ntu.edu.tw/handle/123456789/443325Single-Crystal Y <inf>2</inf> O <inf>3</inf> Epitaxially on GaAs(001) and (111) Using Atomic Layer Depositionjournal article10.3390/ma81053642-s2.0-84946556044https://www.scopus.com/inward/record.uri?eid=2-s2.0-84946556044&doi=10.3390%2fma8105364&partnerID=40&md5=7a09fbe091602b2215c8f392ddd9f223