A fundamental modeling approach for nano-grinding of silicon wafers

Young, H. T.H. T.YoungHuang, H. Y.H. Y.HuangYang, Y. J.Y. J.YangHONG-TSU YOUNG2020-01-132020-01-132006978-0-87849-990-8https://scholars.lib.ntu.edu.tw/handle/123456789/447501A fundamental modeling approach for nano-grinding of silicon wafersbook partWOS:000235279200043